2009 ITRS

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ITRS 2009 Edition

Executive Summary
System Drivers
Design
Test & Test Equipment
Process Integration, Devices & Structures
RF and A/MS Technologies for Wireless Communications
Emerging Research Devices
Emerging Research Materials
Front End Processes
Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Health
Yield Enhancement
Metrology
Modeling & Simulation

2009 ERRATA-Executive Summary, list of corrections

2009 ITRS Table Files Links

ORTC Tables	Overall Technology Roadmap Characters. (Key Roadmap Drivers)
FOCUS A Tables	Test & Test Equipment \| RF and AMS for Wireless
FOCUS B Tables	Emerging Research Devices (ERD) \| Emerging Research Materials (ERM)
FOCUS C Tables	Front-end Processes (FEP) \| Process Integration, Devices, & Structures (PIDS)
FOCUS D Tables	Lithography \| Factory Integration
FOCUS E Tables	Interconnect \| Assembly and Packaging
FOCUS F Tables	System Drivers \| Design
CROSS CUT A Tables	Environment, Safety, & Health (ESH) \| Metrology \| Modeling & Simulation
CROSS CUT B Tables	Yield Enhancement

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.