2007 Preparations

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2007 Preparations

Instructions

2007 Guidelines for ITWG Chairs and Editors

Schedule

2007 Key Dates to print

2007 ITRS Table Templates

Focus ITWG File

Cross-cut ITWG File

2007 ITRS Chapter Files
Focus ITWGs	Word Files		2007 Page Count
Executive Summary/ORTC	2005	2006	60/32
System Drivers	2005	2006	25
Design	2005	2006	53
Test and Test Equipment	2005	2006	63
Process Integration, Devices, and Structures (PIDS)	2005	2006	55
RF and Analog/Mixed Signal Technologies for Wireless Communications	2005	2006	40
Emerging Research Devices (ERD)	2005	na	74
Front-End Processes (FEP)	2005	2006	66
Lithography	2005	2006	29
Interconnect	2005 [Corrected] Errata	2006	62
Factory Integration	2005	2006	45
Assembly and Packaging	2005	2006	50


Cross-cut ITWGs	Word Files		2007 Page Count
Emerging Research Materials (ERM)	2005 [ERM section in ERD]	na	45
Environment, Safety, and Health (ESH)	2005	2006	27
Yield Enhancement	2005	2006	48
Metrology	2005	2006	47
Modeling and Simulation	2005	2006	36

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.