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2000 Update
Overall Roadmap Technology Characteristics (ORTC)
Design
Test
PIDS
Front End Processes
Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Heatlh
Defect Reduction
Metrology
Modeling & Simulation
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.