ITRS SEMATECH Contacts

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ITRS Contacts within International SEMATECH
Working Group	Name	Phone	EMail
Front End Processes	Raj Jammy	(512) 356-3098	raj.jammy@sematech.org
Lithography	Michael Lercel	(512) 356-7522	michael.lercel@sematech.org
Interconnect	Sitaram Arkalud	(512) 356-3372	sitaram.arkalgud@sematech.org
Environment, Safety & Health	Walter Worth	(512)356-7199	walter.worth@sematech.org
Yield Enhancement	Dilip Patel	(512) 356-7074	dilip.patel@ismi.sematech.org
ITRS Manager	Linda Wilson	512.356.3605	linda.wilson@sematech.org
Roadmap Webmaster	Sarah Mangum	512.356.3558	sarah.mangum@sematech.org

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.