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ITRS 2013 EDITION
  2013 Executive Summary by the International Roadmap Committee (IRC)      
  2013 Acknowledgments      
  2013 IRC Overview      
  2013 Overall Roadmap Technology Characteristics (ORTC) Table

 

  REPORT TITLE Table File Chapter File  
    System Drivers 2013 tables 2013 chapter  
  Front End of Line Topics      
    Process Integration, Devices, and Structures (PIDS) 2013 tables 2013 chapter  
    RF and Analog/Mixed-signal Technologies (RFAMS) 2013 tables 2013 chapter  
    Lithography 2013 tables 2013 chapter  
    Front End Processes (FEP) 2013 tables 2013 chapter  
    Emerging Research Devices (ERD) 2013 tables 2013 chapter  
    Emerging Research Materials (ERM) 2013 tables 2013 chapter  
  Back End of Line Topics      
    Interconnect 2013 tables 2013 chapter  
    Test and Test Equipment 2013 tables 2013 chapter  
    Assembly & Packaging 2013 tables 2013 chapter  
    Micro-Electro-Mechanical Systems (MEMS) 2013 tables 2013 chapter  
  Enabling Technologies      
    Design 2013 tables 2013 chapter  
    Modeling & Simulation 2013 tables 2013 chapter  
    Factory Integration 2013 tables 2013 chapter  
    Environment, Safety & Health (ESH) 2013 tables 2013 chapter  
    Metrology 2013 tables 2013 chapter  
    Yield Enhancement 2013 tables 2013 chapter  
        
     
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.