| ITRS 2011 Edition | ||||
| 2011 Acknowledgments | ||||
| 2011 Executive Summary | ||||
| 2011 Overall Roadmap Technology Characteristics (ORTC) Tables | ||||
2011 Technology Working Group Reports' - Tables and Chapters to Download |
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| Test and Test Equipment | 2011 tables | 2011 chapter | ||
| Process Integration, Devices, and Structures (PIDS)
PLUS NEW MASTAR Model |
2011 tables | 2011 chapter | ||
| RF and Analog/Mixed-signal Technologies (RFAMS) | 2011 tables | 2011 chapter | ||
| Micro-Electro-Mechanical Systems (MEMS) | 2011 tables | 2011 chapter | ||
| Emerging Research Devices (ERD)
|
2011 tables | 2011 chapter | ||
| Emerging Research Materials (ERM) | 2011 tables | 2011 chapter | ||
| Front End Processes (FEP) | 2011 tables | 2011 chapter | ||
| Lithography | 2011 tables | 2011 chapter | ||
| Factory Integration | 2011 tables | 2011 chapter | ||
| Environment, Safety & Health | 2011 tables | 2011 chapter | ||
| Yield Enhancement | 2011 tables | 2011 chapter | ||
| Metrology | 2011 tables | 2011 chapter | ||
| Modeling & Simulation | 2011 tables | 2011 chapter | ||
| System Drivers | 2011 tables | 2011 chapter | ||
| Design | 2011 tables | 2011 chapter | ||
| Interconnect | 2011 tables | 2011 chapter | ||
| Assembly & Packaging | 2011 tables | 2011 chapter | ||
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