| ITRS 2010 Update | ||
| 2010 Acknowledgments | ||
| The 2010 Update files below are a result of continued review by each of the working groups and contain the latest information available from these committees. Based on the 2009 ITRS, these files now include printable table notes for all the tables. Links to the 2009 chapters are included on this page, too. | ||
| 2010 Update Overview | ||
| 2010 Overall Roadmap Technology Characteristics (ORTC) Tables | ||
| 2009 Executive Summary | ||
| International Technology Working Group | 2010 Update | 2009 ITRS |
| System Drivers | 2010 updated figures | 2009 chapter |
| Design | 2010 updated section and figure | 2009 chapter |
| Test and Test Equipment | 2010 tables | 2009 chapter |
| Process Integration, Devices, and Structures (PIDS) | 2010 tables | 2009 chapter |
| RF and A/MS Technologies for Wireless Communications | 2010 tables | 2009 chapter |
| Emerging Research Devices (ERD) Emerging Research Materials (ERM) |
2010 Future Memory Devices Workshop Summary | ERD 2009 chapter |
| ERM 2009 chapter | ||
| Front End Processes (FEP) | 2010 tables | 2009 chapter |
| Lithography | 2010 tables | 2009 chapter |
| Interconnect | 2010 tables | 2009 chapter |
| Factory Integration | 2010 tables | 2009 chapter |
| Assembly & Packaging | 2010 tables | 2009 chapter |
| Environment, Safety & Health | 2010 tables | 2009 chapter |
| Yield Enhancement | 2010 tables | 2009 chapter |
| Metrology | 2010 tables | 2009 chapter |
| Modeling & Simulation | 2010 tables | 2009 chapter |
| 2009 ERRATA-Executive Summary, list of corrections | ||
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