Conference Proceedings

Presentations from the 2009 Summer ITRS Public Conference on 15 July in San Francisco

Overall Roadmap Technology Characteristics -- Alan Allan

Process Integration, Devices, & Structures -- Rich Liu

Emerging Research Materials -- Mike Garner

Emerging Research Devices -- Jim Hutchby

RF & A/MS Technologies for Wireless Communications -- Herb Bennett

Metrology -- Alain Diebold

Environmental, Safety, & Health -- Jim Jewett

Lithography -- Greg Hughes

Test & Test Equipment -- Roger Barth

System Drivers and Design -- Andrew Kahng

Interconnect -- Christopher Case

Factory Integration -- Shigeru Kobayashi

Yield Enhancement -- Lothar Pfitzner

Front End Processes -- Jeff Butterbaugh

Modeling & Simulation -- Jürgen Lorenz

Assembly & Packaging -- Bill Bottoms

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.