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ITRS 2006 Update

Executive Summary
System Drivers
Design
Test & Test Equipment
Process Integration, Devices & Structures
RF & A/MS Technologies for Wireless Communication
Emerging Research Devices was not updated for 2006, refer to 2005 Chapter
Front End Processes
Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Health
Yield Enhancement
Metrology
Modeling & Simulation

Acronyms

 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.