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International Technology Roadmap for Semiconductors
2003 ITRS Conference
Tsin Chu, Taiwan
December 2, 2003
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ORTC
Design & System Drivers
Test & Test Equipment
Process Integration, Devices and Structures
Emerging Research Devices
Wireless
Front End Processes
Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Health
Yield Enhancement
Metrology
Modeling & Simulation
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.