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International Technology Roadmap for Semiconductors
De Rode Hoed, Amsterdam, Netherlands
3-4 April 2003
3 April Plenary
 4 April Plenary
Design
Lithography
Environment, Safety & Health
Test
Interconnect
Yield Enhancement
Process Integration
Factory Integration
Metrology
Wireless Technology
Assembly & Packaging Modeling & Simulation
Emerging Devices
Front End Processes
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.

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