ITRS 2002 Tokyo Presentations

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International Technology Roadmap for Semiconductors 2002 Update Conference Tokyo International Forum, Tokyo, Japan December 4, 2002
Working Group	Presentations		Posters
Overall Roadmap Technology Characteristics	PowerPoint	Acrobat	PowerPoint 1 PowerPoint 2	Acrobat
Design	PowerPoint	Acrobat	PowerPoint	Acrobat
Test & Test Equipment	PowerPoint	Acrobat	PowerPoint	Acrobat
Process Integration, Devices & Structures (includes Emerging Research Devices)	PowerPoint	Acrobat	PowerPoint	Acrobat
Front End Processes	PowerPoint	Acrobat	PowerPoint	Acrobat
Lithography	PowerPoint	Acrobat	PowerPoint	Acrobat
Interconnect	PowerPoint	Acrobat	PowerPoint	Acrobat
Factory Integration	PowerPoint	Acrobat	PowerPoint	Acrobat
Assembly & Packaging	PowerPoint	Acrobat	Word	Acrobat
Environment, Safety & Health	PowerPoint	Acrobat	PowerPoint	Acrobat
Yield Enhancement	PowerPoint	Acrobat	PowerPoint	Acrobat
Metrology	PowerPoint	Acrobat	PowerPoint	Acrobat
Modeling & Simulation	PowerPoint	Acrobat	PowerPoint	Acrobat

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.