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2002 Update
Key Changes
Foreword
Table of Contents
Introduction
Overall Roadmap Technology Characteristics (ORTC)
System Drivers / Design
Test & Test Equipment
Process Integration, Devices & Structures (includes Emerging Research Devices)
Front End Processes
Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Health
Yield Enhancement
Metrology
Modeling & Simulation
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.