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International Technology Roadmap for Semiconductors
San Francisco, California, USA
July 24, 2002
Working Group Presentations Posters
Overall Roadmap Technology Characteristics PowerPoint Acrobat PowerPoint 1
PowerPoint 2		 Acrobat
Design PowerPoint Acrobat    
Test & Test Equipment PowerPoint Acrobat PowerPoint Acrobat
Process Integration, Devices & Structures
(includes Emerging Research Devices)		 PowerPoint Acrobat PowerPoint Acrobat
Front End Processes PowerPoint Acrobat PowerPoint Acrobat
Lithography PowerPoint Acrobat PowerPoint Acrobat
Interconnect PowerPoint Acrobat    
Factory Integration PowerPoint Acrobat PowerPoint Acrobat
Assembly & Packaging PowerPoint Acrobat PowerPoint Acrobat
Environment, Safety & Health PowerPoint Acrobat    
Yield Enhancement PowerPoint Acrobat PowerPoint Acrobat
Metrology PowerPoint Acrobat PowerPoint Acrobat
Modeling & Simulation PowerPoint Acrobat PowerPoint Acrobat
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.

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This page was last updated on January 23, 2011.