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International Technology Roadmap for Semiconductors
San Francisco, California, USA
July 11, 2000
ORTC
Design
Test
Process Integration
Front End Processes Lithography
Interconnect
Factory Integration
Assembly & Packaging
Environment, Safety & Health
Defect Reduction
Metrology
Modeling & Simulation
 
The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.