The Latest ITRS in Microsoft Word and Excel Files for ITWG members

ITRS 2011 GOLD FILES
These "GOLD" files now include printable table notes for all the tables. Links to the 2009 chapters in WORD are included on this page, too.

International Technology Working Group	2010 Update	2009 ITRS
System Drivers	2009 tables	2009 chapter
Design	2009 tables	2009 chapter
Test and Test Equipment	2010 tables	2009 chapter
Process Integration, Devices, and Structures (PIDS)	2010 tables	2009 chapter
RF and A/MS Technologies for Wireless Communications	2010 tables	2009 chapter
Emerging Research Devices (ERD)	2009 tables	2009 chapter
Emerging Research Materials (ERM)	2009 tables	2009 chapter
Front End Processes (FEP)	2010 tables	2009 chapter
Lithography	2010 tables	2009 chapter
Interconnect	2010 tables	2009 chapter
Factory Integration	2010 tables	2009 chapter
Assembly & Packaging	2010 tables	2009 chapter
Environment, Safety & Health	2010 tables	2009 chapter
Yield Enhancement	2010 tables	2009 chapter
Metrology	2010 tables	2009 chapter
Modeling & Simulation	2010 tables	2009 chapter

The ITRS is devised and intended for technology assessment only and is without regard
to any commercial considerations pertaining to individual products or equipment.